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Semiconductor Gas Sensors by O Tan, R Jaaniso

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5

Recent advances in wide bandgap semiconductor-based gas sensors

F. Ren and S.J. Pearton,     University of Florida, USA

Abstract:

We review recent progress in wide bandgap thin-film and nanorod sensors made from GaN or ZnO and related materials for applications in the detection of gases such as oxygen, carbon dioxide and hydrogen. Practical aspects are covered, such as the use of differential sensor pairs to eliminate the effects of temperature variations and of the effect of humidity on the detection sensitivity.

Key words

gallium nitride

zinc oxide

heterostructure

nanorods

semiconductors

5.1 Introduction

Semiconductor-based sensors can be fabricated using mature techniques from the Si chip industry and/or novel nanotechnology approaches. ...

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